Optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Precision Engineering
سال: 2017
ISSN: 0141-6359
DOI: 10.1016/j.precisioneng.2017.05.005